Quoting ASML themselves (from here: https://www.asml.com/en/company/about-asml/history)

In 1984, electronics giant Philips and chip-machine manufacturer Advanced Semiconductor Materials International (ASMI) created a new company to develop lithography systems for the growing semiconductor market. Called ASM Lithography, we began our days inauspiciously, located in a leaky shed next to a Philips office in Eindhoven, the Netherlands