At that point I’m not sure if there’s a point running Linux on such a small device. With 64MB RAM, you won’t even be able to run a Python interpreter, let alone any useful services.
You can run Python just fine in 64MB (were you thinking 64KB?). I've written substantial multi-threaded Python applications on boards like that. It used to be a lot of memory! But increase it if you want. You can run Micropython pretty comfortably with 64KB by the way. CPython might need more like 1MB, idk.
The ESP32-P4 for example has up to 32MB in-package RAM and can deal with extra external SPI RAM.
On https://www.espressif.com/en/products/socs/esp32-p4 it says 768K. 32MB might be possible with SPI ram.
Without the overhead of running a Linux Kernel, you might even get more performance out of that.
The OS actually does useful things (multiple processes with memory protection) which is the point of wanting to run it instead of an MCU.
In my region the CM5 is €50-€150 and the CM4 is €32-€102.
Yikes, that is pretty expensive, considering that most cheap Android phones have way more compute power AND a phone with a display etc. This is from 2021 and is the type of thing I have in mind:
Idk if anything came of it. There was a mention at the time of using it on a Linux board same size as a Seeed Xiao.
The Pocket Beagle 2 is maybe like a CM4 or rpi 4 and is $29:
The original Pocket Beagle was priced around the same, from 2017:
https://www.righto.com/2017/12/hands-on-with-pocketbeagle-tiny-25.html
Plus of course there is the whole Pi Zero series. Shouldn't these CM's cost less rather than more?